01 Project Background
The project is for a semiconductor design and manufacturing enterprise in Zhejiang, which is headquartered in Hangzhou. The company focuses on the design and manufacture of memory chips and related chips, and provides semiconductor chips and application solutions for the Internet of Things, smart transmission terminals, industrial control and automotive electronics.
As the line width decreases, the chip manufacturing process becomes more complex. Also, the process is more cumbersome and there are more types of chemicals to be used. Many critical processes (such as photolithography) need to be performed in a specifically clean environment. In addition to controlling the concentration of conventional Total Suspended Particles (TSP) pollutants, it is also necessary to strictly control the concentration of Airborne Molecular Contamination (AMC) with smaller diameters in the clean room. And in specific areas (such as the yellow light area), additional attention should be given to the control of some insoluble compounds (Refractory Compounds, RC) to ensure that the lens of the lithography machine is in a good working environment.
Definition and classification of AMC
The air supply of industrial clean workshops is generally fresh air supply from air conditioning boxes and circulating air supply. In order to control the concentration of AMC, chemical filters are generally installed on the fan filter unit (FFU) in the circulating air system, to carry out relevant air treatment for specific areas in the clean workshop. This situation requires a retrofit. A one-piece chemical filter has been installed on the FFU, in the yellow light area of the clean room, to remove acidic compounds, alkaline compounds and condensable compounds. Due to business expansion factors, two lithography machines were added. Hence, it was necessary to focus on the control of refractory compounds (RC) in the clean room.
02 Product Description
MayAir has provided the on-site AMC sampling service for the project. After the actual concentration information was analysed, we installed the special filter, Puro-F for RC compound removal, on the existing FFU chemical filter products.
Exterior of Puro-F chemical filter
03 Contrast in RC detection concentration before and after chemical filtration installation
After installation, the third-party testing agency conducted sample testings. The tests showed that the concentration of RC compounds was successfully controlled in this area of the clean room to a level below 0.1ppbv. Thereafter, from the continuous monitoring of concentration of RC chemicals in the area by the third-party testing agency, it has been shown that the service life of the RC chemical filter product had exceeded the owner’s expectations by three times. Hence, we have reached the level of being a leader in the filtration industry.
RC concentration before chemical filter installation (third party report)
RC concentration after chemical filter installation (third party report)
Concentration changes before and after RC filter installation (third party report)
The fields of application for MayAir's products are mainly in clean room air purification, indoor air quality optimization, and air pollution emission control, etc. Our products are mainly applied in downstream subdivisions, which includes semiconductors, biopharmaceuticals, food, medical institutions, large commercial buildings, public places, home environment, industrial dust removal, VOCs treatment, etc.
MayAir has invested in the construction of a chemical laboratory of more than 1,000 square meters. It is equipped with material analysis and sampling analysis capabilities, and can perform resistance testing, initial efficiency testing, gas release testing, and dust emission testing. With a joined force of richly experienced technical support personnel, we can quickly and effectively solve any series of related problems for our customers from pre-sale, in-sale and after-sale. Furthermore, we provide a reliable 7*24 hours service.
With more than 20 years of professional experience in providing air purification solutions, MayAir has always been known for providing quality products and services, and serving different industries and a large number of end customers.
